| Record ID | marc_loc_2016/BooksAll.2016.part21.utf8:203848475:914 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part21.utf8:203848475:914?format=raw |
LEADER: 00914cam a2200265 a 4500
001 92028941
003 DLC
005 20080311083433.0
008 920727s1992 nyua b 001 0 eng
010 $a 92028941
020 $a0306441462
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.B725 1992
082 00 $a621.381$220
100 1 $aBrodie, Ivor.
245 04 $aThe physics of micro/nano-fabrication /$cIvor Brodie and Julius J. Muray.
260 $aNew York :$bPlenum Press,$cc1992.
300 $axix, 650 p. :$bill. ;$c26 cm.
440 0 $aMicrodevices
504 $aIncludes bibliographical references and indexes.
650 0 $aMicroelectronics.
650 0 $aThin-film circuits.
700 1 $aMuray, Julius J.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0820/92028941-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0820/92028941-t.html