| Record ID | marc_loc_2016/BooksAll.2016.part21.utf8:214862046:1095 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part21.utf8:214862046:1095?format=raw |
LEADER: 01095pam a2200253 a 4500
001 92042556
003 DLC
005 19930412130316.9
008 921230s1993 ne a b 100 0 eng
010 $a 92042556
020 $a0444899154 (alk. paper)
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.E87 1992
082 00 $a621.3815$220
110 2 $aEuropean Materials Research Society.$bMeeting$d(1992 :$cStrasbourg, France)
245 10 $aSingle chamber processing :$bproceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 /$cedited by Yves I. Nissim, Avishay Katz.
260 $aAmsterdam ;$aNew York :$bNorth-Holland,$c1993.
300 $ax, 162 p. :$bill. ;$c29 cm.
440 0 $aEuropean Materials Research Society symposia proceedings ;$vv. 37
504 $aIncludes bibliographical references.
650 0 $aSemiconductors$xDesign and construction$xCongresses.
650 0 $aVacuum technology$xCongresses.
700 10 $aNissim, Yves I.,$d1953-
700 10 $aKatz, Avishay.