| Record ID | marc_loc_2016/BooksAll.2016.part23.utf8:118791741:1050 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part23.utf8:118791741:1050?format=raw |
LEADER: 01050pam a2200253 a 4500
001 94005418
003 DLC
005 20040309095513.0
008 940620s1994 paua b 101 0 eng
010 $a 94005418
020 $a1558992375
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.A3483 1994
082 00 $a621.3815/2$220
245 00 $aAdvanced metallization for devices and circuits--science, technology, and manufacturability :$bsymposium held April 4-8, 1994, San Francisco, California, U.S.A. /$ceditors, S.P. Murarka ... [et al.].
260 $aPittsburgh, Pa. :$bMaterials Research Society,$cc1994.
300 $axiv, 768 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings,$x0272-9172 ;$vv. 337
504 $aIncludes bibliographical references and indexes.
650 0 $aSemiconductors$xDesign and construction$xCongresses.
650 0 $aMetallizing$xCongresses.
650 0 $aMetallic films$xCongresses.
700 1 $aMurarka, S. P.
830 0 $aMaterials Research Society symposia proceedings ;$vv. 337.