| Record ID | marc_loc_2016/BooksAll.2016.part23.utf8:122187880:1037 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part23.utf8:122187880:1037?format=raw |
LEADER: 01037cam a2200253 a 4500
001 94009632
003 DLC
005 19950821083330.8
008 940302s1994 paua b 101 0 eng
010 $a 94009632
020 $a1558992332
040 $aDLC$cDLC$dDLC
050 00 $aTK7871$b.G37 1994
082 00 $a621.3815/2$220
245 00 $aGas-phase and surface chemistry in electronic materials processing :$bsymposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. /$ceditors, T.J. Mountziaris ... [et al.].
260 $aPittsburgh, Pa. :$bMaterials Research Society,$cc1994.
300 $axv, 556 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings ;$vv. 334
504 $aIncludes bibliographical references and indexes.
650 0 $aElectronics$xMaterials$xSurfaces$xCongresses.
650 0 $aSurface chemistry$xCongresses.
700 10 $aMountziaris, Triantafillos John.
710 20 $aMaterials Research Society.
830 0 $aMaterials Research Society symposia proceedings ;$vv. 334.