| Record ID | marc_loc_2016/BooksAll.2016.part24.utf8:134231074:1592 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part24.utf8:134231074:1592?format=raw |
LEADER: 01592cam a2200337 a 4500
001 95070376
003 DLC
005 19980128150933.0
008 960201s1995 waua b 101 0 eng d
010 $a 95070376 //r98
020 $a0819420077
035 $a(OCoLC)33474487
040 $aMoKL$cMoKL$dDLC
042 $alccopycat
050 04 $aTK7874$b.M474 1995
082 00 $a621.381$221
245 00 $aMicroelectronic structures and microelectromechanical devices for optical processing and multimedia applications :$b24 October, 1995, Austin, Texas /$cWayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash. :$bSPIE,$cc1995.
300 $av, 154 p. :$bill. ;$c28 cm.
490 1 $aProceedings / SPIE--the International Society for Optical Engineering ;$vv. 2641
504 $aIncludes bibliographic references and index.
650 0 $aMicroelectronics$xCongresses.
650 0 $aMicroelectromechanical systems$xCongresses.
650 0 $aOptoelectronics$xCongresses.
700 1 $aBailey, Wayne E.
700 1 $aMotamedi, M. Edward.
700 1 $aLuo, Fang-Chen.
710 2 $aSemiconductor Equipment and Materials International.
710 2 $aNational Institute of Standards and Technology (U.S.)
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 2641.