| Record ID | marc_loc_2016/BooksAll.2016.part25.utf8:82329849:1588 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part25.utf8:82329849:1588?format=raw |
LEADER: 01588cam a2200313 a 4500
001 96013321
003 DLC
005 20080312083342.0
008 960308s1996 ne a b 101 0 eng
010 $a 96013321
020 $a0792340116 (acid-free paper)
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.A355 1996
082 00 $a621.3815/2$220
245 00 $aAdvances in rapid thermal and integrated processing /$cedited by Fred Roozeboom.
260 $aDordrecht ;$aBoston :$bKluwer Academic Publishers,$cc1996.
300 $axii, 565 p. :$bill. ;$c25 cm.
490 1 $aNATO ASI series: Series E, Applied sciences ;$vvol. 318
500 $a"Published in cooperation with NATO Scientific Affairs Division."
500 $a"Proceedings of the NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Precessing, Acquafredda di Maratea, Italy, July 3-14, 1995"--T.p. verso.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xHeat treatment$vCongresses.
650 0 $aRapid thermal processing$vCongresses.
700 1 $aRoozeboom, Fred.
710 2 $aNorth Atlantic Treaty Organization.$bScientific Affairs Division.
711 2 $aNATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Processing$d(1995 :$cAcquafredda di Maratea, Italy)
830 0 $aNATO ASI series.$nSeries E,$pApplied sciences ;$vno. 318.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0822/96013321-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0822/96013321-t.html