| Record ID | marc_loc_2016/BooksAll.2016.part26.utf8:37403725:1047 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part26.utf8:37403725:1047?format=raw |
LEADER: 01047cam a2200277 a 4500
001 97003783
003 DLC
005 20080311084741.0
008 970130s1997 nyua b 001 0 eng
010 $a 97003783
020 $a0306450542
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.B64 1997
082 00 $a621.3815/2$221
100 1 $aBorisenko, V. E.$q(Viktor Evgenévich)
245 10 $aRapid thermal processing of semiconductors /$cVictor E. Borisenko, Peter J. Hesketh.
260 $aNew York :$bPlenum Press,$cc1997.
300 $axxii, 358 p. :$bill. ;$c26 cm.
440 0 $aMicrodevices
440 4 $aThe language of science
504 $aIncludes bibliographical references (p. 301-353) and index.
650 0 $aSemiconductors$xDesign and construction.
650 0 $aRapid thermal processing.
700 1 $aHesketh, P. J.$q(Peter J.)
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0821/97003783-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0821/97003783-t.html