| Record ID | marc_loc_2016/BooksAll.2016.part27.utf8:149384518:1320 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part27.utf8:149384518:1320?format=raw |
LEADER: 01320cam a2200325 a 4500
001 98226760
003 DLC
005 19990617084736.4
008 980325s1998 wau b 101 0 eng d
010 $a 98226760
020 $a0819427152
035 $a(OCoLC)38848591
040 $aCU-S$cCU-S$dDLC
042 $alccopycat
050 00 $aTA1660$b.M57 1998
082 00 $a621.36/93$221
245 00 $aMiniaturized systems with micro-optics and micromechanics III :$b26-27 January 1998, San Jose, California /$cM. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash., USA :$bSPIE,$cc1998.
300 $avii, 282 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3276
504 $aIncludes bibliographical references and index.
650 0 $aIntegrated optics$xCongresses.
650 0 $aMiniature electronic equipment$xCongresses.
650 0 $aMicromechanics$xCongresses.
650 0 $aOptical scanners$xCongresses.
650 0 $aMicroelectromechanical systems$xCongresses.
700 1 $aMotamedi, M. Edward.
700 1 $aGöring, Rolf.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3276.