| Record ID | marc_loc_2016/BooksAll.2016.part27.utf8:15544736:883 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part27.utf8:15544736:883?format=raw |
LEADER: 00883cam a2200241 a 4500
001 98020529
003 DLC
005 20060718185126.0
008 980505s1998 ne a b 000 0 eng
010 $a 98020529
020 $a0444823638 (alk. paper)
040 $aDLC$cDLC$dDLC
050 00 $aTJ163$b.M48 1998
082 00 $a621$221
245 00 $aMicro mechanical systems :$bprinciples and technology /$cedited by T. Fukuda and W. Menz.
260 $aAmsterdam ;$aNew York :$bElsevier,$c1998.
300 $aviii, 268 p. :$bill. ;$c25 cm.
440 0 $aHandbook of sensors and actuators ;$vv. 6
504 $aIncludes bibliographical references.
650 0 $aMicroelectromechanical systems$xHandbooks, manuals, etc.
700 1 $aFukuda, T.$q(Toshio),$d1948-
700 1 $aMenz, W.$q(Wolfgang)
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0601/98020529-d.html