| Record ID | marc_loc_2016/BooksAll.2016.part28.utf8:221806365:921 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part28.utf8:221806365:921?format=raw |
LEADER: 00921cam a22002654a 4500
001 2001044737
003 DLC
005 20020907181904.0
008 010822s2002 maua b 001 0 eng
010 $a 2001044737
020 $a0072393912 (alk. paper)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.H794 2002
082 00 $a621.381$221
100 1 $aHsu, Tai-Ran.
245 10 $aMEMS and microsystems :$bdesign and manufacture /$cTai-Ran Hsu.
260 $aBoston :$bMcGraw-Hill,$cc2002.
300 $axii, 436 p. :$bill. ;$c24 cm.
504 $aIncludes bibliographical references (p. 427-431) and index.
650 0 $aMicroelectronics.
650 0 $aMicroelectromechanical systems.
650 0 $aMicroelectronic packaging.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/description/mh021/2001044737.html
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html