| Record ID | marc_loc_2016/BooksAll.2016.part28.utf8:223617825:1167 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part28.utf8:223617825:1167?format=raw |
LEADER: 01167cam a22002894a 4500
001 2001046659
003 DLC
005 20040621182723.0
008 010824s2002 nyua f 001 0 eng
010 $a 2001046659
020 $a0471316717 (cloth : alk. paper)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTP201$b.M57 2002
082 00 $a660/.02/1$221
100 1 $aMiśra, Āśutosha,$d1970-
245 10 $aHandbook of chemicals and gases for the semiconductor industry /$cAshutosh Misra, Jeremiah D. Hogan, Russell Chorush.
260 $aNew York :$bWiley-VCH,$cc2002.
300 $axiii, 363 p. :$bill. ;$c25 cm.
504 $aIncludes bibliographical references and index.
650 0 $aChemicals$vHandbooks, manuals, etc.
650 0 $aSemiconductors$xMaterials$vHandbooks, manuals, etc.
700 1 $aHogan, Jeremiah D.
700 1 $aChorush, Russell.
856 42 $3Contributor biographical information$uhttp://www.loc.gov/catdir/bios/wiley042/2001046659.html
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/description/wiley034/2001046659.html
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/wiley021/2001046659.html