| Record ID | marc_loc_2016/BooksAll.2016.part28.utf8:78116171:1368 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part28.utf8:78116171:1368?format=raw |
LEADER: 01368cam a2200301 a 4500
001 99200342
003 DLC
005 20090805082401.0
008 980925s1998 waua b 101 0 eng d
010 $a 99200342
020 $a0819429708
035 $a(OCoLC)39930212
040 $aMoKL$cMoKL$dOCoLC$dDLC
042 $alccopycat
050 00 $aTJ1191.5$b.M5523 1998
082 00 $a621.3815/2$221
245 00 $aMicromachining and microfabrication process technology IV :$b21-22 September, 1998, Santa Clara, California /$cJames H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
260 $aBellingham, Wash. :$bSPIE,$cc1998.
300 $axi, 402 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3511
504 $aIncludes bibliographical references and author index.
650 0 $aMicromachining$vCongresses.
650 0 $aMicrofabrication$vCongresses.
650 0 $aElectromechanical devices$xDesign and construction$vCongresses.
700 1 $aSmith, James H.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aSemiconductor Equipment and Materials International.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3511.