| Record ID | marc_loc_2016/BooksAll.2016.part29.utf8:6041587:900 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part29.utf8:6041587:900?format=raw |
LEADER: 00900cam a22002654a 4500
001 2001268815
003 DLC
005 20030910203608.0
008 010530s2001 gw a b 001 0 eng
010 $a 2001268815
020 $a3527296344
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.M436 2001
082 00 $a621.381$221
100 1 $aMenz, W.$q(Wolfgang)
245 10 $aMicrosystem technology /$cW. Menz, J. Mohr, O. Paul.
260 $aWeinheim ;$aNew York :$bWiley-VCH,$cc2001.
300 $axii, 500 p. :$bill. ;$c25 cm.
504 $aIncludes bibliographical references (p. [465]-483) and index.
650 0 $aMicroelectronics.
700 1 $aMohr, J.$q(Jürgen)
700 1 $aPaul, Oliver.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/description/wiley033/2001268815.html
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/wiley021/2001268815.html