| Record ID | marc_loc_2016/BooksAll.2016.part31.utf8:116852768:1775 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part31.utf8:116852768:1775?format=raw |
LEADER: 01775cam a22003857a 4500
001 2003544708
003 DLC
005 20060620124323.0
008 030606s2003 waua b 101 0 eng d
010 $a 2003544708
020 $a0819447838
035 $a(OCoLC)ocm51894276
040 $aCUS$cCUS$dDLC
042 $alccopycat
050 00 $aTK7874$b.M53255 2003
082 00 $a621.381$222
245 00 $aMOEMS and miniaturized systems III :$b27-29 January 2003, San Jose, California, USA /$cJames H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA).
246 3 $aMicroelectromechanical systems and miniaturized systems III
260 $aBellingham, Wash., USA :$bSPIE,$cc2003.
300 $axlvi, 368 p. :$bill. (some col.) ;$c28 cm.
490 1 $aSPIE proceedings series,$x0277-786X ;$vv. 4983
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMiniature electronic equipment$vCongresses.
650 0 $aMicromechanics$vCongresses.
650 0 $aOptics, Adaptive$vCongresses.
650 0 $aOptical scanners$vCongresses.
700 1 $aSmith, James H.
700 1 $aKrulevitch, Peter A.
700 1 $aLakner, Hubert K.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aSemiconductor Equipment and Materials International.
710 2 $aSolid State Technology (Organization)
710 2 $aSandia National Laboratories.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4983.