| Record ID | marc_loc_2016/BooksAll.2016.part31.utf8:178117667:865 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part31.utf8:178117667:865?format=raw |
LEADER: 00865cam a22002654a 4500
001 2004046158
003 DLC
005 20060821115514.0
008 040308s2004 maua b 001 0 eng
010 $a 2004046158
020 $a1580535364
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7875$b.M4537 2004
082 00 $a681/.2$222
245 00 $aMEMS mechanical sensors /$cStephen Beeby ... [et al.].
260 $aBoston :$bArtech House,$cc2004.
300 $ax, 269 p. :$bill. ;$c26 cm.
490 1 $aArtech House microelectromechanical system series
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems.
650 0 $aDetectors.
700 1 $aBeeby, Stephen.
830 0 $aMicroelectromechanical systems series.
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/fy0611/2004046158.html