| Record ID | marc_loc_2016/BooksAll.2016.part31.utf8:197598888:1661 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part31.utf8:197598888:1661?format=raw |
LEADER: 01661cam a22003617a 4500
001 2004102296
003 DLC
005 20060104115131.0
008 040218s2004 njua b 101 0 eng d
010 $a 2004102296
040 $aKSW$cKSW$dOCLCQ$dDLC
020 $a1566774063
035 $a(OCoLC)ocm55893627
042 $alccopycat
050 00 $aTK7871.85$bA3535 2004
245 00 $aAdvanced short-time thermal processing for Si-based CMOS devices II :$bproceedings of the international symposium /$ceditors, Mehmet C. Öztürk, F. Roozeboom ... [et al.].
246 3 $aAdvanced short-time thermal processing for Si-based CMOS devices 2
246 3 $aAdvanced short-time thermal processing for Si-based CMOS devices two
260 $aPennington, NJ :$bElectrochemical Society,$cc2004.
300 $axii, 428 p. :$bill. ;$c24 cm.
490 1 $aProceedings ;$vv. PV 2004-01
500 $a"Electronics, Dielectric Science and Technology, High Temperature Materials" divisions.
504 $aIncludes bibliographical references and indexes.
650 0 $aSemiconductors$xHeat treatment.
650 0 $aRapid thermal processing.
700 1 $aÖztürk, Mehmet C.
700 1 $aRoozeboom, Fred.
710 2 $aElectrochemical Society.$bElectronics Division.
710 2 $aElectrochemical Society.$bDielectric Science and Technology Division.
710 2 $aElectrochemical Society.$bHigh Temperature Materials Division.
710 2 $aElectrochemical Society.$bMeeting$n(205th :$d2004 :$cSan Antonio, Tex.)
830 0 $aProceedings (Electrochemical Society) ;$vv. 2004-01.
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/fy055/2004102296.html