| Record ID | marc_loc_2016/BooksAll.2016.part31.utf8:221377723:1486 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part31.utf8:221377723:1486?format=raw |
LEADER: 01486cam a22003497a 4500
001 2004298704
003 DLC
005 20130417082048.0
008 040412s2003 waua b 101 0 eng d
010 $a 2004298704
020 $a0819450626
035 $a(OCoLC)ocm53333768
040 $aLHL$cLHL$dDLC
042 $alccopycat
050 00 $aTA418.7$b.S9276 2003
082 00 $a681/.25$222
245 00 $aSurface scattering and diffraction III :$b4-6 August, 2003, San Diego, California, USA /$cZu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
246 3 $aSurface scattering and diffraction for advanced metrology
260 $aBellingham, Wash. :$bSPIE,$cc2003.
300 $avii, 198 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 5189
500 $aPrevious symposia entitled: Surface scattering and diffraction for advanced metrology.
504 $aIncludes bibliographical references and author index.
650 0 $aSurface roughness$xMeasurement$vCongresses.
650 0 $aDiffractive scattering$vCongresses.
650 0 $aOptical measurements$vCongresses.
650 0 $aScattering (Physics)$vCongresses.
650 0 $aMetrology$vCongresses.
700 1 $aGu, Zu-Han.
700 1 $aMaradudin, Alexei A.,$d1931-
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 5189.