| Record ID | marc_loc_2016/BooksAll.2016.part32.utf8:172952529:1255 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part32.utf8:172952529:1255?format=raw |
LEADER: 01255cam a22003254a 4500
001 2005050109
003 DLC
005 20070411082321.0
008 050525s2006 flua b 001 0 eng
010 $a 2005050109
020 $a0849391385 (alk. paper)
020 $a0849321069 (set : alk. paper)
040 $aDLC$cDLC$dDLC$dDLC
042 $apcc
050 00 $aTK7875$b.M444 2005
082 00 $a621.381$222
245 00 $aMEMS :$bdesign and fabrication /$cedited by Mohamed Gad-el-Hak.
250 $a2nd ed.
260 $aBoca Raton, FL :$bCRC/Taylor & Francis,$c2006.
300 $a1 v. (various pagings) :$bill. ;$c26 cm.
490 1 $aMechanical engineering series
490 0 $aThe MEMS handbook
500 $aOne of three parts whose previous edition was a published as a single volume.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$xDesign and construction.
650 0 $aMicrofabrication.
700 1 $aGad-el-Hak, Mohamed,$d1945-
830 0 $aMechanical engineering series (Boca Raton, Fla.)
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/fy0702/2005050109.html
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0668/2005050109-d.html