| Record ID | marc_loc_2016/BooksAll.2016.part32.utf8:178870198:919 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part32.utf8:178870198:919?format=raw |
LEADER: 00919cam a22002774a 4500
001 2005056888
003 DLC
005 20061229083624.0
008 051031s2006 nyua b 001 0 eng
010 $a 2005056888
020 $a0750309768
020 $a9780750309769
035 $a(OCoLC)ocm62290646
040 $aDLC$cDLC$dBAKER$dC#P$dDLC
042 $apcc
050 00 $aTA2020$b.M35 2006
082 00 $a621.044$222
100 1 $aMakabe, T.$q(Toshiaki)
245 10 $aPlasma electronics :$bapplications in microelectronic device fabrication /$cT. Makabe, Z. Petrović.
260 $aNew York :$bTaylor & Francis,$c2006.
300 $a339 p. :$bill. ;$c25 cm.
440 0 $aSeries in plasma physics
504 $aIncludes bibliographical references and index.
650 0 $aPlasma engineering.
700 1 $aPetrović, Z.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0653/2005056888-d.html