| Record ID | marc_loc_2016/BooksAll.2016.part33.utf8:169565709:1589 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part33.utf8:169565709:1589?format=raw |
LEADER: 01589cam a22003617a 4500
001 2006282012
003 DLC
005 20070201082314.0
008 060830s2006 waua b 101 0 eng d
010 $a 2006282012
040 $aLHL$cLHL$dIXA$dDLC
020 $a081946063X
035 $a(OCoLC)ocm63658962
042 $alccopycat
050 00 $aTK7875$b.I26 2005
082 00 $a621$222
245 00 $aICO20 :$bMEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China /$cMasayoshi Esashi, Zhaoying Zhou, chairs/editors ; organized by ICO--International Commission for Optics ...[et al.] ; sponsored by AFOSR Asia Office ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
246 30 $aMEMS, MOEMS, and NEMS
260 $aBellingham, Wash. :$bSPIE,$cc2006.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE ;$vv. 6032
504 $aIncludes bibliographical references and author index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aImaging systems$vCongresses.
650 0 $aOptoelectronic devices$vCongresses.
650 0 $aNanostructured materials$vCongresses.
650 0 $aNanotechnology$vCongresses.
700 1 $aEsashi, Masayoshi,$d1949-
700 1 $aZhou, Zhaoying.
710 2 $aInternational Commission for Optics.
710 1 $aUnited States.$bAir Force.$bOffice of Scientific Research.$bAsia Office.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6032.