| Record ID | marc_loc_2016/BooksAll.2016.part34.utf8:185827134:1064 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part34.utf8:185827134:1064?format=raw |
LEADER: 01064cam a2200289 a 4500
001 2007299456
003 DLC
005 20090101084524.0
008 070920s2007 waua b 101 0 eng
010 $a 2007299456
020 $a9780819467171
040 $aDLC$cDLC
050 00 $aTK7875$b.S6354 2007
082 00 $a621$222
245 00 $aSmart sensors, actuators, and MEMS III :$b2-4 May 2007, Maspalomas, Gran Canaria, Spain /$cThomas Becker, Carles Cané, N. Scott Barker, editors.
260 $aBellingham, Wash. :$bSPIE,$cc2007.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 0 $aProceedings of SPIE,$x0277-786X ;$vv. 6589
504 $aIncludes bibliographical references and indexes.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMicrotechnology$vCongresses.
650 0 $aActuators$xIndustrial applications$vCongresses.
650 0 $aDetectors$xIndustrial applications$vCongresses.
650 0 $aScanning systems$vCongresses.
700 1 $aBecker, Thomas.
700 1 $aCané, Carles.
700 1 $aBarker, N. Scott