MARC Record from Library of Congress

LEADER: 01966cam a22003857a 4500
001 2007299552
003 DLC
005 20100722090726.0
008 070928s2007 waua b 101 0 eng d
010 $a 2007299552
020 $a9780819465719
020 $a0819465712
035 $a(OCoLC)ocn123303095
040 $aSCW$cSCW$dSCW$dCUS$dDLC
042 $alccopycat
050 00 $aTA1505$b.P43333 2007
082 00 $a621.36$222
245 00 $aPhoton processing in microelectronics and photonics VI :$b22-25 January 2007, San Jose, California, USA /$cCraig B. Arnold ... [et al.], editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash. :$bSPIE,$cc2007.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 6458
500 $a"Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing XII cosponsored by AFOSR--Air Force Office of Scientific Research (USA)."
505 0 $apt. A. Laser applications in microelectronic and optoelectronic manufacturing XII -- pt. B. Synthesis and photonics of nanoscale materials V.
504 $aIncludes bibliographical references and author index.
650 0 $aPhotonics$vCongresses.
650 0 $aPhotons$vCongresses.
650 0 $aMicroelectronics$vCongresses.
700 1 $aArnold, Craig B.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 1 $aUnited States.$bAir Force.$bOffice of Scientific Research.
740 02 $aLaser applications in microelectronic and optoelectronic manufacturing XII.
740 02 $aSynthesis and photonics of nanoscale materials V.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6458.
856 41 $3Unedited summary from book$uhttp://www.loc.gov/catdir/summary/eng0801/2007299552.html
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/fy0801/2007299552.html