| Record ID | marc_loc_2016/BooksAll.2016.part41.utf8:162525149:943 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part41.utf8:162525149:943?format=raw |
LEADER: 00943cam a2200277 i 4500
001 2014016456
003 DLC
005 20150415082433.0
008 140804s2015 flua b 001 0 eng c
010 $a 2014016456
020 $a9781482222050 (hardcover : alk. paper)
040 $aOU/DLC$beng$cOU$erda$dDLC
042 $apcc
050 00 $aTA2020$b.M35 2015
082 00 $a621.044$223
100 1 $aMakabe, T.$q(Toshiaki),$eauthor.
245 10 $aPlasma electronics :$bapplications in microelectronic device fabrication /$cToshiaki Makabe, Zoran Lj. Petrovic.
250 $aSecond edition.
264 1 $aBoca Raton :$bCRC Press, Taylor & Francis Group,$c[2015]
300 $axxxv, 376 pages :$billustrations ;$c24 cm
336 $atext$2rdacontent
337 $aunmediated$2rdamedia
338 $avolume$2rdacarrier
504 $aIncludes bibliographical references and index.
650 0 $aPlasma engineering.
700 1 $aPetrović, Z.,$eauthor.