| Record ID | marc_loc_updates/v35.i53.records.utf8:5420543:1717 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v35.i53.records.utf8:5420543:1717?format=raw |
LEADER: 01717cam a22003617a 4500
001 2007281794
003 DLC
005 20071231110046.0
008 071126s2007 waua b 101 0 eng d
010 $a 2007281794
020 $a9780819466402 (pbk.)
035 $a(OCoLC)ocn144608222
040 $aSCW$cSCW$dDLC
042 $alccopycat
050 00 $aTK7874$b.D474976 2007
082 00 $a621.382$222
245 00 $aDesign for manufacturability through design-process integration:$b28 February-2 March 2007, San Jose, California, USA /$cAlfred K.K. Wong, Vivek, K. Singh, editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH (USA).
260 $aBellingham, Wash. :$bSPIE,$cc2007.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 6521
500 $aPrevious conference proceedings entitled: Design and process integration for microelectronic manufacturing
504 $aIncludes bibliographical references and author index.
650 0 $aIntegrated circuits$xDesign and construction$vCongresses.
650 0 $aIntegrated circuits$xDefects$xAnalysis$vCongresses.
650 0 $aSemiconductors$xDesign and construction$vCongresses.
650 0 $aSemiconductor wafers$xDefects$xAnalysis$vCongresses.
650 0 $aMicroelectronics industry$xQuality control$vCongresses.
650 0 $aQuality control$vCongresses.
700 1 $aWong, Alfred Kwok-Kit.
700 1 $aSingh, Vivek K.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aInternational SEMATECH.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6521.