| Record ID | marc_loc_updates/v36.i10.records.utf8:10020218:954 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v36.i10.records.utf8:10020218:954?format=raw |
LEADER: 00954cam a2200253 a 4500
001 98027506
003 DLC
005 20080310131240.0
008 980611s1998 maua b 001 0 eng
010 $a 98027506
020 $a0792382242 (alk. paper)
040 $aDLC$cDLC$dDLC
050 04 $aTK7871.15.S55$bK36 1998
082 00 $a621.3815$221
100 1 $aKamins, Theodore I.
245 10 $aPolycrystalline silicon for integrated circuits and displays /$cby Ted Kamins.
250 $a2nd ed.
260 $aBoston :$bKluwer Academic Publishers,$cc1998.
300 $axv, 378 p. :$bill. ;$c25 cm.
504 $aIncludes bibliographical references (p. [317]-368) and index.
650 0 $aIntegrated circuits$xMaterials.
650 0 $aSilicon$xElectric properties.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0821/98027506-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0821/98027506-t.html