| Record ID | marc_loc_updates/v36.i13.records.utf8:11819491:1120 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v36.i13.records.utf8:11819491:1120?format=raw |
LEADER: 01120nam a22002654a 4500
001 2007925112
003 DLC
005 20080326162418.0
008 070319s2007 njua b 100 0 eng
010 $a 2007925112
020 $a1424412277 (softbound edition)
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.I2226 2007
111 2 $aIEEE International Conference on Advanced Thermal Processing of Semiconductors$n(15th :$d2007 :$cCatania, Italy)
245 10 $a15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 :$bOctober 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /$cIEEE Electron Devices Society.
246 30 $aRTP 2007
260 $aPiscataway, NJ :$bIEEE,$cc2007.
300 $a326 p. :$bill. ;$c28 cm.
500 $a"IEEE Catalog Number: 07EX1783"--T.p. verso.
504 $aIncludes bibliographical references.
650 0 $aSemiconductors$xHeat treatment$vCongresses.
650 0 $aRapid thermal processing$vCongresses.
650 0 $aSemiconductor doping$vCongresses.
650 0 $aSemiconductors$xDefects$vCongresses.
710 2 $aIEEE Electron Devices Society.