| Record ID | marc_loc_updates/v36.i42.records.utf8:9741569:1192 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v36.i42.records.utf8:9741569:1192?format=raw |
LEADER: 01192cam a22003377a 4500
001 2006365086
003 DLC
005 20081015073029.0
008 060112s2005 enka b 001 0 eng d
010 $a 2006365086
020 $a1855739313 (Woodhead)
020 $a0849334470 (CRC)
020 $a1845690907 (e-book)
020 $a9781855739314
024 3 $a978845690908 (e-book)
035 $a(CStRLIN)PAUGV3938440-B
035 $a(PU)3938440
040 $aNRC$cNRC$dDLC
042 $alccopycat
050 00 $aTK7874$b.N318 2005
082 00 $a621.3815/31$222
245 00 $aNanolithography and patterning techniques in microelectronics /$cedited by David G. Bucknall.
260 $aCambridge :$bWoodhead Pub. ;$aBoca Raton, FL :$bCRC Press,$cc2005.
300 $axiv, 409 p. :$bill. ;$c24 cm.
440 0 $aWoodhead Publishing in materials
504 $aIncludes bibliographical references and index.
650 0 $aMicrolithography.
650 0 $aNanotechnology.
700 1 $aBucknall, David G.
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/fy0607/2006365086.html
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html