| Record ID | marc_loc_updates/v38.i06.records.utf8:63181:973 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v38.i06.records.utf8:63181:973?format=raw |
LEADER: 00973cam a22002778a 4500
001 00028173
003 DLC
005 20100203130121.0
008 000229s2000 nyu b 001 0 eng
010 $a 00028173
020 $a0815514441
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.H3494 2001
082 00 $a621.3815/31$221
245 00 $aHandbook of VLSI microlithography :$bprinciples, technology, and applications /$c[edited] by John Helbert.
250 $a2nd ed.
260 $aNorwich, NY :$bNoyes Publications/William Andrew Pub.,$c2000.
263 $a0101
300 $ap. cm.
504 $aIncludes bibliographical references and index.
650 0 $aIntegrated circuits$xVery large scale integration.
650 0 $aMicrolithography.
700 1 $aHelbert, John N.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/description/wap041/00028173.html
856 41 $3Table of contents$uhttp://www.loc.gov/catdir/toc/wap041/00028173.html