| Record ID | marc_loc_updates/v40.i11.records.utf8:3250234:1000 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v40.i11.records.utf8:3250234:1000?format=raw |
LEADER: 01000cam a2200265 a 4500
001 2008051282
003 DLC
005 20120309150453.0
008 081202s2009 fluaf b 001 0 eng
010 $a 2008051282
020 $a9781420059113 (hardcover : alk. paper)
020 $a1420059114 (hardcover : alk. paper)
035 $a(OCoLC)ocn277040881
040 $aDLC$cDLC$dYDX$dYDXCP$dBWX$dCDX$dDLC
050 00 $aTK7874.84$b.P35 2009
082 00 $a621.3815/2$222
100 1 $aPaik, Ungyu.
245 10 $aNanoparticle engineering for chemical-mechanical planarization :$bfabrication of next-generation nanodevices /$cUngyu Paik, Jea-Gun Park.
260 $aBoca Raton, FL :$bCRC Press/Taylor & Francis Group,$cc2009.
300 $axiii, 191 p., [14] p. of plates :$bill. (some col.) ;$c25 cm.
504 $aIncludes bibliographical references (p. 171-175) and index.
650 0 $aChemical mechanical planarization.
650 0 $aNanoparticles.
650 0 $aNanoelectronics.
700 1 $aPark, Jea-Gun.