MARC Record from Miami University of Ohio

LEADER: 01832cam 2200385Ka 4500
001 ocm27701163
005 19930418130938.0
008 930310s1992 mdu b f000 0 eng d
040 $aGPO$cGPO
049 $aMIB*
074 $a0247 (MF)
086 0 $aC 13.10:260-119
086 0 $aC 13.10:260-119
086 0 $aC 13.10:260-119
100 1 $aVezzetti, Carol F
245 10 $aAntireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems$h[microform] :$bstandard reference materials /$cCarol F. Vezzetti, Ruth N. Varner, James E. Potzick
260 $aGaithersburg, MD :$bU.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ;$a[Springfield, VA :$bOrder from National Technical Information Service,$c1992]
300 $a1 v
490 1 $aNIST special publication ;$v260-119
500 $aDistributed to depository libraries in microfiche
500 $aShipping list no.: 92-2587-M
533 $aMicrofiche.$b[Washington, D.C.?] :$cSupt. of Docs., U.S. G.P.O.,$d[1992]$e1 microfiche : negative
650 0 $aMicroscopes$xCalibration$xStandards
650 0 $aIntegrated circuits$xMasks$xMeasurement
650 0 $aChromium$xSpectra$xStandards
700 10 $aVarner, Ruth N
700 10 $aPotzick, James E
710 20 $aNational Institute of Standards and Technology (U.S.)
740 01 $aStandard reference materials
740 01 $aAntireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
740 01 $aStandard reference materials
830 0 $aNIST special publication ;$v260-119
907 $a.b18081927$b11-20-94$c05-25-93
998 $adoc$b11-20-94$cm$da$e-$feng$gmdu$h0$i1
945 $g1$j0$ldocsf$nrecd$o-$p$0.00$sf$t21$u0$v0$w0$x0$y.i20621747$z06-14-93