| Record ID | marc_miami_univ_ohio/allbibs0136.out:1886783:939 |
| Source | Miami University of Ohio |
| Download Link | /show-records/marc_miami_univ_ohio/allbibs0136.out:1886783:939?format=raw |
LEADER: 00939pam 22002654a 4500
001 ocm46456397
005 20010518000000.0
008 010308s2001 nyua b 001 0 eng
010 $a2001028403
020 $a0824703804 (alk. paper)
040 $aDLC$cDLC$dYDX
042 $apcc
049 $aMIAS
050 00 $aTK7871.85$b.C6175 2001
245 00 $aContamination-free manufacturing for semiconductors and other precision products /$cedited by Robert P. Donovan
260 $aNew York :$bMarcel Dekker,$cc2001
300 $ax, 448 p. :$bill. ;$c24 cm
504 $aIncludes bibliographical references and index
650 0 $aSemiconductors$xDesign and construction
650 0 $aSemiconductors$xDefects
700 1 $aDonovan, R. P
907 $a.b28500313$b06-23-03$c05-21-01
998 $ascl$b06-12-01$cm$da$e-$feng$gnyu$h0$i0
947 $ama
945 $g1$i35054024720555$j0$lscli $o $p$0.00$q $r $s-$t0$u0$v0$w0$x0$y.i37480510$z06-12-01