| Record ID | marc_nuls/NULS_PHC_180925.mrc:294028548:1309 |
| Source | marc_nuls |
| Download Link | /show-records/marc_nuls/NULS_PHC_180925.mrc:294028548:1309?format=raw |
LEADER: 01309cam 2200373 a 4500
001 9920921570001661
005 20150423132331.0
008 090710s2010 ne a b 001 0 eng
015 $aGBA974559$2bnb
016 7 $a015337154$2Uk
020 $a9780815515944 (hbk.)
020 $a0815515944 (hbk.)
035 $a(CSdNU)u399744-01national_inst
035 $a(OCoLC)428777214
035 $a(OCoLC)428777214
035 $a(OCoLC)428777214
040 $aUKM$cUKM$dBWX$dCDX$dC#P$dYDXCP
049 $aCNUM
050 4 $aTK7875$b.H36 2010
082 04 $a621.38152$222
245 00 $aHandbook of silicon based MEMS materials and technologies /$cVeikko Lindroos ... [et al.].
250 $a1st ed.
260 $aAmsterdam ;$aBoston :$bWilliam Andrew/Elsevier,$c2010.
300 $axxxii, 636 p. :$bill ;$c29 cm.
440 0 $aMicro & nano technologies
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems.
650 0 $aMicroelectromechanical systems$xMaterials.
650 0 $aSilicon$xElectric properties.
700 1 $aLindroos, Veikko.
947 $fSOET-ENG$hCIRCSTACKS$p$210.70$q1
949 $aTK7875 .H36 2010$i31786102654271
994 $a92$bCNU
999 $aTK 7875 .H36 2010$wLC$c1$i31786102654271$lCIRCSTACKS$mNULS$rY$sY $tBOOK$u4/14/2010