| Record ID | marc_records_scriblio_net/part01.dat:27434865:1369 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part01.dat:27434865:1369?format=raw |
LEADER: 01369cam 2200313 a 4500
001 00266008
003 DLC
005 20001128090800.0
008 000323s1999 waua b 101 0 eng d
010 $a 00266008
020 $a081943471X
035 $a(OCoLC)ocm42869812
040 $aLHL$cLHL$dDLC
042 $alccopycat
050 00 $aTJ1191.5$b.M5524 1999
082 00 $a621.3815/2$221
245 00 $aMicromachining and microfabrication process technology V :$b20-22 September, 1999, Santa Clara, California /$cJames H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].
260 $aBellingham, Washington :$bSPIE,$cc1999.
300 $ax, 434 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3874
504 $aIncludes bibliographic references and author index.
650 0 $aMicromachining$vCongresses.
650 0 $aMicrofabrication$vCongresses.
650 0 $aElectromechanical devices$xDesign and construction$vCongresses.
700 1 $aSmith, James H.
700 1 $aKaram, Jean-Michel.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aSolid State Technology (Organization)
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3874.