MARC Record from Scriblio

LEADER: 02153cam 22003857a 4500
001 00268121
003 DLC
005 20010905105705.0
008 000624s1999 wau b 101 0 eng d
010 $a 00268121
035 $a(OCoLC)ocm41488035
040 $aCUS$cCUS$dOCL$dDLC
042 $alccopycat
020 $a0819431397
050 00 $aTK7872.M3$bE97 1998
082 00 $a621.3815$221
111 2 $aEuropean Conference on Mask Technology for Integrated Circuits and Microcomponents$n(15th :$d1998 :$cMunich-Unterhaching, Germany)
245 10 $a15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 :$b16-17 November 1998, Munich-Unterhaching, Germany /$cUwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering.
246 3 $aFifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents
246 30 $aEuropean Conference on Mask Technology for Integrated Circuits and Microcomponents
246 30 $aMask technology for integrated circuits and microcomponents
260 $aBellingham, Wash., USA :$bSPIE,$cc1999.
300 $aix, 180 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3665
504 $aIncludes bibliographical references and index.
650 0 $aIntegrated circuits$xMasks$vCongresses.
650 0 $aMicrolithography$vCongresses.
650 0 $aX-ray lithography$vCongresses.
700 1 $aBehringer, Uwe.
710 2 $aVDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.
710 2 $aForschungszentrum Karlsruhe.$bInstitute for Microstructure Technology.
710 2 $aSEMI-Europe.
710 2 $aBACUS (Technical Group)
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3665.