| Record ID | marc_records_scriblio_net/part15.dat:43896925:1484 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part15.dat:43896925:1484?format=raw |
LEADER: 01484cam 22003257a 4500
001 2004296874
003 DLC
005 20050705092936.0
008 040212s2003 waua b 101 0 eng d
010 $a 2004296874
020 $a081944779X
035 $a(OCoLC)ocm52054641
040 $aLHL$cLHL$dDLC
042 $alccopycat
050 00 $aTJ1191.5$b.M5524322 2003
082 00 $a671.3/5$222
245 00 $aMicromachining and microfabrication process technology VIII :$b27-29 January, 2003, San Jose, California, USA /$cJohn A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
260 $aBellingham, Wash. :$bSPIE,$cc2003.
300 $aix, 604 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 4979
504 $aIncludes bibliographical references and author index.
650 0 $aMicromachining$vCongresses.
650 0 $aMicrofabrication$vCongresses.
650 0 $aElectromechanical devices$xDesign and construction$vCongresses.
700 1 $aYasaitis, John.
700 1 $aPerez-Maher, Mary Ann.
700 1 $aKaram, Jean-Michel.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aSemiconductor Equipment and Materials International.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4979.