| Record ID | marc_records_scriblio_net/part19.dat:102973635:773 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part19.dat:102973635:773?format=raw |
LEADER: 00773pam 2200229 a 4500
001 87033436
003 DLC
005 19880225081559.2
008 871123s1988 maua b 00110 eng
010 $a 87033436
020 $a0898382599
050 0 $aTK7871.15.S55$bK36 1988
082 0 $a621.381/71$219
100 10 $aKamins, Theodore I.
245 10 $aPolycrystalline silicon for integrated circuit applications /$cby Ted Kamins.
260 0 $aBoston :$bKluwer Academic Publishers,$cc1988.
300 $axii, 290 p. :$bill. ;$c24 cm.
440 0 $aKluwer international series in engineering and computer science ;$vSECS 45
504 $aBibliography: p. 249-280.
500 $aIncludes index.
650 0 $aIntegrated circuits$xMaterials.
650 0 $aSilicon$xElectric properties.