| Record ID | marc_records_scriblio_net/part20.dat:158044217:1067 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part20.dat:158044217:1067?format=raw |
LEADER: 01067cam 2200265 a 4500
001 89039134 //r95
003 DLC
005 19950913140058.1
008 890808s1989 paua b 101 0 eng
010 $a 89039134 //r95
020 $a1558990194
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.R345 1989
082 00 $a621.381/52$220
245 00 $aRapid thermal annealing/chemical vapor deposition and integrated processing :$bsymposium held April 25-28, 1989, San Diego, California, U.S.A. /$ceditors, David Hodul ... [et al.].
260 0 $aPittsburgh, Pa. :$bMaterials Research Society,$cc1989.
300 $axi, 494 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings ;$vv. 146
504 $aIncludes bibliographical references.
650 0 $aSemiconductors$xHeat treatment$xCongresses.
650 0 $aSemiconductor doping$xCongresses.
650 0 $aVapor plating$xCongresses.
650 0 $aRapid thermal processing$xCongresses.
700 10 $aHodul, David.
830 0 $aMaterials Research Society symposia proceedings ;$vv. 146.