| Record ID | marc_records_scriblio_net/part24.dat:11832776:1288 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part24.dat:11832776:1288?format=raw |
LEADER: 01288cam 2200277 a 4500
001 93243530 //r95
003 DLC
005 19951012075454.7
008 931214s1993 ohua b 100 0 eng
010 $a 93243530 //r95
020 $a188241702X
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.H3892 1993
082 00 $a621.3815/2$220
245 00 $aHazard assessment and control technology in semiconductor manufacturing II.
260 0 $aCincinnati, Ohio :$bAmerican Conference of Governmental Industrial Hygenists,$cc1993.
300 $avii, 347 p. :$bill. ;$c24 cm.
500 $aPapers presented at the Second National Conference on Hazard Assessment and Control Technology in Semiconductor Manufacturing, held in Westboro, Mass., Oct. 1991.
500 $aSpine title: Semiconductor manufacturing, II.
504 $aIncludes bibliographical references.
650 0 $aSemiconductor industry$xSafety measures$xCongresses.
710 20 $aAmerican Conference of Governmental Industrial Hygienists.
711 20 $aNational Conference on Hazard Assessment and Control Technology in Semiconductor Manufacturing$n(2nd :$d1991 :$cWestborough, Mass.)
740 01 $aSemiconductor manufacturing, II.
740 01 $aSemiconductor manufacturing, 2.
740 01 $aSemiconductor manufacturing, two.