MARC Record from Scriblio

LEADER: 01467cam 2200289 a 4500
001 97175564
003 DLC
005 19980408102124.5
008 970723s1997 paua b 101 0 eng
010 $a 97175564
020 $a1558993851
040 $aDLC$cDLC$dDLC
050 00 $aTK7874.76$b.A312 1997
082 00 $a621.39/5$221
245 00 $aAdvanced metallization and interconnect systems for ULSI applications in 1996 :$bproceedings of the conference held October 1-3, 1996, in Boston, Massachusetts, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 23-24, 1996, in Tokyo, Japan /$ceditors, Robert Havemann ... [et al.].
260 $aPittsburgh, Pa. :$bMaterials Research Society,$cc1997.
300 $axvi, 608 p. :$bill. ;$c24 cm.
490 1 $aConference proceedings,$x1048-0854
504 $aIncludes bibliographical references and indexes.
650 0 $aIntegrated circuits$xUltra large scale integration$xDesign and construction$xCongresses.
650 0 $aVapor-plating$xCongresses.
650 0 $aElectrochemical metallizing$xCongresses.
650 0 $aDielectrics$xCongresses.
650 0 $aTitanium nitride$xCongresses.
700 1 $aHavemann, Robert$q(Robert H.)
710 2 $aUniversity of California, Berkeley.$bContinuing Education in Engineering.
830 0 $aMaterials Research Society conference proceedings.