MARC Record from Scriblio

LEADER: 02153cam 2200385 a 4500
001 98087959
003 DLC
005 20000726112501.0
006 m d
007 co ugu
008 980904s1998 nyua b 101 0 eng d
010 $a 98087959
020 $a1563967537 (set)
020 $a1563968681 (CD-ROM)
035 $a(OCoLC)40618877
035 $a.b26346576
040 $aCU-I$cCU-I$dDLC
042 $alccopycat
050 04 $aTK7874.76$b.C49 1998
082 00 $a621.39/5$221
245 00 $aCharacterization and metrology for ULSI technology :$b1998 international conference, Gaithersburg, Maryland, March 1998 /$ceditors, David G. Seiler ... [et al.].
260 $aWoodbury, NY :$bAmerican Institute of Physics,$cc1998.
300 $axv, 960 p. :$bill. ;$c28 cm. +$e1 computer optical disk
490 1 $aAIP conference proceedings,$x0094-243x ;$v449
500 $a"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.
504 $aIncludes bibliographical references and indexes.
500 $aAccompanying computer disc contains full text from the book.
538 $aSystem requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader.
538 $aSystem requirements for Macintosh computer disk: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader.
538 $aSystem requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.
650 0 $aIntegrated circuits$xUltra large scale integration$vCongresses.
650 0 $aIntegrated circuits$xUltra large scale integration$vCongresses$vSoftware.
700 1 $aSeiler, David G.
711 2 $aInternational Conference on Characterization and Metrology for ULSI Technology$d(1998 :$cGaithersburg, Md.)
830 0 $aAIP conference proceedings ;$vno. 449.