| Record ID | marc_records_scriblio_net/part27.dat:125335088:1528 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part27.dat:125335088:1528?format=raw |
LEADER: 01528cam 2200325 a 4500
001 98122577
003 DLC
005 19990105163337.5
008 971022s1997 wau b 101 0 eng d
010 $a 98122577
020 $a0819426555
035 $a(OCoLC)37826172
040 $aCU-S$cCU-S$dDLC
042 $alccopycat
050 04 $aTJ1191.5$b.M552 1997
082 00 $a621.3815/2$221
245 00 $aMicromachining and microfabrication process technology III :$b29-30 September, 1997, Austin, Texas /$cShih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology.
260 $aBellingham, Wash., USA :$bSPIE,$cc1997.
300 $aix, 310 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3223
504 $aIncludes bibliographical references and index.
650 0 $aMicromachining$xCongresses.
650 0 $aMicrofabrication$xCongresses.
650 0 $aElectromechanical devices$xDesign and construction$xCongresses.
700 1 $aPang, Stella W.
700 1 $aChang, Shih-Chia.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aSemiconductor Equipment and Materials International.
710 2 $aNational Institute of Standards and Technology (U.S.)
830 0 $aProceedings of SPIE--the International Society of Optical Engineering ;$vv. 3223.