| Record ID | marc_records_scriblio_net/part27.dat:83187448:1021 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part27.dat:83187448:1021?format=raw |
LEADER: 01021pam 2200265 a 4500
001 98033480
003 DLC
005 20010808121718.0
008 980618s1998 paua b 101 0 eng
010 $a 98033480
020 $a1558994157
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.M34414 1998
082 00 $a621.381$221
245 00 $aMaterials issues in vacuum microelectronics :$bsymposium held April 13-16, 1998, San Francisco, California, U.S.A. /$ceditors, Wei Zhu ... [et al.].
260 $aWarrendale, Pa. :$bMaterials Research Society,$cc1998.
300 $axi, 207 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings ;$vv. 509
504 $aIncludes bibliographical references and indexes.
650 0 $aVacuum microelectronics$vCongresses.
650 0 $aThin films$vCongresses.
650 0 $aField emission cathodes$vCongresses.
650 0 $aIon implantation$vCongresses.
700 1 $aZhu, Wei,$d1963-
830 0 $aMaterials Research Society symposia proceedings ;$vv. 509.