| Record ID | marc_university_of_toronto/uoft.marc:208094375:1279 |
| Source | University of Toronto |
| Download Link | /show-records/marc_university_of_toronto/uoft.marc:208094375:1279?format=raw |
LEADER: 01279cam 22002530a 4500
008 890915s1988 wau a b 1 1 eng d
020 $a0892529563
046 $aDLC$cDLC
050 00 $aTK7874$b.I54682 1988
082 0 $a621.381/5$z20
090 8 $aTK 7874 .I516 1988$bENGI$c1
245 00 $aIntegrated circuit metrology, inspection, and process control II :$b29 February-1 March 1988, Santa Clara, California /$cKevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
260 0 $aBellingham, Wash., USA :$bSPIE,$cc1988.
300 $aviii, 458 p. :$bill. ;$c28 cm. --
440 0 $aProceedings of SPIE--the International Society for Optical Engineering.$vv. 921
504 $aIncludes bibliographies and index.
650 0 $aIntegrated circuits$xInspection$xCongresses.
650 0 $aIntegrated circuits$xMeasurement$xCongresses.
700 10 $aMonahan, Kevin M.
710 20 $aSociety of Photo-optical Instrumentation Engineers.
740 01 $aIntegrated circuit metrology, inspection, and process control 2.
740 01 $aIntegrated circuit metrology, inspection, and process control two.
948 $a07/15/1992$b05/16/1999
949 $aTK7874 .I516 1988$wLC$c1$i31761014883201$d19/7/1993$lSTACKS$mENGI_CSCI$n2$q2$rY$sY$tBOOK$u26/8/1992