| Record ID | marc_university_of_toronto/uoft.marc:4743229487:1161 |
| Source | University of Toronto |
| Download Link | /show-records/marc_university_of_toronto/uoft.marc:4743229487:1161?format=raw |
LEADER: 01161cam 2200253 a 4500
001 ATT9323
005 20041104100459.5
008 041104s2004 gw a b 000 0 eng d
020 $a3832227458
039 $frp/rp(rp)
050 4 $aTK7870$b.P75 2004
245 00 $aProduction techniques for application specific microsensors /$cGünter Köhler, Thomas Schroeter, Guido Tschulena, eds.
260 $aAachen :$bShaker Verlag,$c2004.
300 $a369 p. :$bill. ;$c21 cm.
440 0 $aBerichte aus der Mikrosystemtechnik,$x1610-5907
504 $aIncludes bibliographical references.
536 $aThe research and development project PAMIS was funded by the German Federal Ministry for Education and Research (BMBF) within the national "Research in Production for Tomorrow" Programme$cfund numbers 02PP2310-02PP2317
650 0 $aMiniature electronic equipment$xDesign and construction.
650 0 $aDetectors$xDesign and construction.
650 0 $aMicroelectronics.
700 1 $aKöhler, Günter,$d1941-
700 1 $aSchroeter, Thomas.
700 1 $aTschulena, Guido R.
949 $aTK7870 .P75 2004$wLC$c1$i31761064017007$lSTACKS$mENGI_CSCI$rY$sY$tBOOK$u4/11/2004