| Record ID | marc_university_of_toronto/uoft.marc:5286279835:829 |
| Source | University of Toronto |
| Download Link | /show-records/marc_university_of_toronto/uoft.marc:5286279835:829?format=raw |
LEADER: 00829cam 2200241 a 4500
001 2005056888
005 20060518083452.0
008 051031s2006 nyu b 001 0 eng
020 $a0750309768
039 $fCOUTTS
042 $apcc
050 00 $aTA2020$b.M35 2006
082 00 $a621.044$222
099 $aTA 2020 .M35 2006X ENGI
100 1 $aMakabe, T.$q(Toshiaki).
245 10 $aPlasma electronics :$bapplications in microelectronic device fabrication /$cT. Makabe, Z Petrović.
260 $aNew York :$bTaylor&Francis,$c2006.
300 $a339 p.
440 0 $aSeries in plasma physics
504 $aIncludes bibliographical references and index.
650 0 $aPlasma engineering.
700 10 $aPetrović, Z.
949 $aTA2020 .M35 2006X$wLC$c1$i31761067732701$d9/1/2007$e22/11/2006$lSTACKS$mENGI_CSCI$n3$rY$sY$tBOOK$u30/5/2006