An edition of Low cost silicon array project
(1978)
Low cost silicon array project
experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process
by Union Carbide Corporation
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Publish Date
1979
Language
English
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Subjects
Pyrolysis, Silane, Semiconductors, Silicon, Fluidized reactors| Edition | Availability |
|---|---|
1
Low cost silicon array project: experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process
1979, Dept. of Energy, for sale by the National Technical Information Service]
in English
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2
Low cost silicon array project: feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon
1978, Dept. of Energy, for sale by the National Technical Information Service
in English
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Book Details
Table of Contents
Quarterly progress report, July - Sept. 1979
Quarterly progress report, April
June 1979
Edition Notes
"DRL no. 81."
Contract no. NAS-7-100-954334
The Physical Object
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| January 19, 2010 | Edited by WorkBot | add subjects and covers |
| December 11, 2009 | Created by WorkBot | add works page |