An edition of Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon (1997)

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

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Micro-mechanical voltage tunable Fabry-Perot ...
James D. Patterson, James D. P ...
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Last edited by WorkBot
January 19, 2010 | History
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An edition of Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon (1997)

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

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Publish Date
Publisher
National Aeronautics and Space Administration, Langley Research Center
Language
English
Pages
93

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Subjects

Silicon, Microelectromechanical systems, Fabry-Perot interferometers, Mechanical properties, Optical properties
Edition Availability
Cover of: Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
1997, National Aeronautics and Space Administration, Langley Research Center, Available from National Technical Information Service
in English
Cover of: Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
1997, National Aeronautics and Space Administration, Langley Research Center
Microform in English
Cover of: Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
1997, National Aeronautics and Space Administration
in English

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Book Details

Edition Notes

Performing organization: NASA Langley Research Center.

Includes bibliographical references.

Microfiche. [Washington, D.C.] : Supt. of Docs., USGPO 1997 2 microfiches: negative.

Published in
Hampton, Va

The Physical Object

Format
Microform
Pagination
xii, 93 p.
Number of pages
93

ID Numbers

Open Library
OL17593512M
OCLC/WorldCat
40386301

Source records

Oregon Libraries MARC record

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History

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January 19, 2010 Edited by WorkBot add subjects and covers
December 11, 2009 Created by WorkBot add works page