An edition of Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
(1992)
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
by Carol F Vezzetti
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Publish Date
1992
Publisher
U.S. Dept. of Commerce, National Institute of Standards and Technology,
Order from National Technical Information Service]
Language
English
Pages
37
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| Edition | Availability |
|---|---|
1
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
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aaaa
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2
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
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zzzz
|
Book Details
Edition Notes
Distributed to depository libraries in microfiche
Shipping list no.: 92-2096-M
Paper version no longer for sale by the Supt. of Docs
"Issued January 1992."
Includes bibliographical references
Final
Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative
s 1992 dcu n b
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| January 19, 2010 | Edited by WorkBot | add subjects and covers |
| December 11, 2009 | Created by WorkBot | add works page |