An edition of Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
(1995)
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
by D. J. Larkin
Share
×Close
This edition doesn't have a description yet. Can you add one?
Publish Date
1995
Publisher
National Aeronautics and Space Administration,
National Technical Information Service, distributor
Language
English
Buy this book
Subjects
Silicon, Vapor deposition, Additives, Nitrogen, Epitaxy| Edition | Availability |
|---|---|
1
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
1995, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform
in English
|
aaaa
|
|
2
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
1995, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform
in English
|
zzzz
|
|
3
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
1995, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform
in English
|
zzzz
|
|
4
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
1995, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform
in English
|
zzzz
|
Book Details
Edition Notes
Shipping list no.: 99-0055-M.
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
The Physical Object
ID Numbers
Community Reviews (0)
Feedback?
| January 21, 2010 | Edited by WorkBot | add subjects and covers |
| December 11, 2009 | Created by WorkBot | add works page |