An edition of Ion implantation technology
(2006)
Ion implantation technology
16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
by International Conference on Ion Implanta...
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Subjects
Congresses, Semiconductor doping, Semiconductors, Ion implantation| Edition | Availability |
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Ion implantation technology: 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
2006, American Institute of Physics
in English
0735403651 9780735403659
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Book Details
Table of Contents
Doping processes in semiconductors
Cluster implantation in doping
PIII and plasma doping
Materials : novel techniques and applications
Implant technology
Implant technology (materials)
Process control & yield
Process control & yield (metrology)
Materials.
Edition Notes
Includes bibliographical references and index.
Classifications
The Physical Object
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| December 28, 2022 | Edited by MARC Bot | import existing book |
| April 10, 2020 | Edited by Michel T. Talbot | Added new cover |
| January 23, 2010 | Edited by WorkBot | add more information to works |
| December 11, 2009 | Created by WorkBot | add works page |